NanoFabrication Facility
The NanoFabrication Facility offers a comprehensive set of tools to develop micro and nanoscale materials devices, such as integrated circuits, nanophotonic and solid state devices, microelectro-mechanical systems, and microfluidic systems. The NanoFab features 5,000 square feet of mixed class 100, 1,000, and 10,000 cleanroom space.
Instrumentation
Back End:
Dicing Saw
Spin Rinse Dryer
Wire Bonder
Deposition:
Atomic Layer Deposition
E-beam Evaporator
Furnace LPCVD
PECVD
Sputter
Thermal Evaporator
Etching:
ICP Cl
ICP Fl/DRIE
Plasma Asher
RIE
Vapor HF
XeF2
Lithography:
E-beam Lithography
3D Lithography System
Mask Aligner
Spin Coaters
UV Ozone Cleaner
Metrology:
AFM
Ellipsometer
Filmetrics
3D Optical Profiler
Probe Station
SEM
Stylus Profiler
Furnace Processing:
Furnace Stack
RTA
Milan Begliarbekov, Ph.D.
Technical Cleanroom Manager, Nanofabrication Facility